Title:
DEVICE AND METHOD FOR MEASURING CHANGE IN THICKNESS OR HEIGHT OF OBJECT
Document Type and Number:
WIPO Patent Application WO/2017/039170
Kind Code:
A1
Abstract:
Disclosed are a device and a method for measuring a change in the thickness or the height of an object, the device being provided on the upper part of the object. The disclosed measuring device comprises: a light source which emits a probe light; a light focusing unit which focuses the probe light and irradiates same on an object; a light sensing unit which comprises a Shack-Hartmann sensor and detects a change in a reflected light coming from a reflective surface of the object; and a calculation unit which calculates a change in the height of the reflective surface by using the change in the reflected light detected by the light sensing unit.
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Inventors:
LEE DONG JUN (KR)
HYUN DONG WON (KR)
KIM BYUNG OH (KR)
HYUN DONG WON (KR)
KIM BYUNG OH (KR)
Application Number:
PCT/KR2016/008839
Publication Date:
March 09, 2017
Filing Date:
August 11, 2016
Export Citation:
Assignee:
EO TECHNICS CO LTD (KR)
International Classes:
G01B11/06; G01B11/24
Foreign References:
| KR101422101B1 | 2014-07-23 | |||
| KR0141061B1 | 1998-07-01 | |||
| JPH09229615A | 1997-09-05 | |||
| JPH07134026A | 1995-05-23 |
Other References:
KIM, MIN SEOK ET AL.: "A Study on the Dynamic Range Expansion of the Shack-Hartmann Wavefront Sensor using Image Processing", JOURNAL OF THE OPTICAL SOCIETY OF KOREA, vol. 18, no. 6, December 2007 (2007-12-01), pages 375 - 382, XP055366720
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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