Title:
DEVICE AND METHOD FOR MEASURING VIA HOLE OF SILICON WAFER
Document Type and Number:
WIPO Patent Application WO/2011/162566
Kind Code:
A2
Abstract:
The present invention pertains to a device and a method for measuring a via hole of a silicon wafer, wherein it is possible to precisely measure the depth of the via hole without damaging the wafer. Broadband infrared light is radiated to a silicon wafer which has a superior light transmission property, so that the depth of the via hole may be measured from the light which is reflected from each boundary surface of the wafer and the interference signal of reference light. The via hole measuring device according to the present invention includes: a light source unit for generating broadband infrared light; and an interferometer for radiating the light generated from the light source unit to a silicon wafer, so as to measure the depth of a via hole formed on the wafer according to the spectrum period of the interference signal of the light, which is reflected from the silicon wafer.
Inventors:
JIN, Jong Han (#805, Toyou-I Apartment Bongmyong-dong, Yuseong-gu, Deajeon 305-301, 305-301, KR)
진종한 (대전광역시 유성구 봉명동 투유원아파트 805호, 305-301 Deajeon, 305-301, KR)
KIM, Jae Wan (102-506, Hanbit Apartment 99, Eueon-dong, Yuseong-gu, Deajeon 305-755, 305-755, KR)
김재완 (대전광역시 유성구 어은동 99 한빛아파트 102동 506, 305-755 Deajeon, 305-755, KR)
진종한 (대전광역시 유성구 봉명동 투유원아파트 805호, 305-301 Deajeon, 305-301, KR)
KIM, Jae Wan (102-506, Hanbit Apartment 99, Eueon-dong, Yuseong-gu, Deajeon 305-755, 305-755, KR)
김재완 (대전광역시 유성구 어은동 99 한빛아파트 102동 506, 305-755 Deajeon, 305-755, KR)
Application Number:
KR2011/004616
Publication Date:
December 29, 2011
Filing Date:
June 24, 2011
Export Citation:
Assignee:
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE. (1 Doryong-dong, Yuseong-gu, Daejeon 305-340, 305-340, KR)
한국표준과학연구원 (대전광역시 유성구 도룡동 1, 305-340 Daejeon, 305-340, KR)
JIN, Jong Han (#805, Toyou-I Apartment Bongmyong-dong, Yuseong-gu, Deajeon 305-301, 305-301, KR)
진종한 (대전광역시 유성구 봉명동 투유원아파트 805호, 305-301 Deajeon, 305-301, KR)
KIM, Jae Wan (102-506, Hanbit Apartment 99, Eueon-dong, Yuseong-gu, Deajeon 305-755, 305-755, KR)
한국표준과학연구원 (대전광역시 유성구 도룡동 1, 305-340 Daejeon, 305-340, KR)
JIN, Jong Han (#805, Toyou-I Apartment Bongmyong-dong, Yuseong-gu, Deajeon 305-301, 305-301, KR)
진종한 (대전광역시 유성구 봉명동 투유원아파트 805호, 305-301 Deajeon, 305-301, KR)
KIM, Jae Wan (102-506, Hanbit Apartment 99, Eueon-dong, Yuseong-gu, Deajeon 305-755, 305-755, KR)
International Classes:
G01B11/22; G01B9/02; G01B11/08; G01N21/45
Attorney, Agent or Firm:
KWON, Oh-Sig et al. (4F Jooeunleaderstel, 921 Dunsan-dong, Seo-gu, Daejeon 302-120, 302-120, KR)
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Claims: