Title:
DEVICE AND METHOD FOR PRODUCING FINE GLASS PARTICLE DEPOSITED BODY
Document Type and Number:
WIPO Patent Application WO/2020/116523
Kind Code:
A1
Abstract:
Provided is a device for producing a fine glass particle deposited body by depositing fine glass particles on a starting rod disposed within a reaction vessel, the device being provided with: a burner for synthesizing fine glass particles by jetting out a source gas; a transfer mechanism to which the burner is disposed and which causes the burner to move backward in association with an increase in the diameter of a fine glass particle deposited body; a vaporizer which is disposed to the transfer mechanism so as to be moved backward integrally with the burner and which converts a liquid siloxane into a source gas through vaporization; piping through which the source gas is fed from the vaporizer to the burner; and a heating mechanism which heats up the piping with a heating temperature of at least 230°C.
Inventors:
MORIYA TOMOMI (JP)
Application Number:
PCT/JP2019/047458
Publication Date:
June 11, 2020
Filing Date:
December 04, 2019
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
International Classes:
C03B8/04
Domestic Patent References:
| WO2017187915A1 | 2017-11-02 |
Foreign References:
| JPS57188424A | 1982-11-19 | |||
| JP2003073131A | 2003-03-12 | |||
| JP2015113259A | 2015-06-22 | |||
| JP2014224007A | 2014-12-04 | |||
| JPS6483666A | 1989-03-29 | |||
| JP2015505291A | 2015-02-19 | |||
| JP2006516525A | 2006-07-06 | |||
| JP2019182668A | 2019-10-24 |
Attorney, Agent or Firm:
SHIN-EI PATENT FIRM, P.C. (JP)
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