Title:
DEVICE AND METHOD FOR PRODUCING MASTER DIFFRACTION GRATING
Document Type and Number:
WIPO Patent Application WO/2019/244274
Kind Code:
A1
Abstract:
This device for producing a master diffraction grating is provided with a light source part and a reflection member 11. The light source part forms a first interference fringe by applying light to a substrate surface of a master substrate 101. The reflection member 11 forms a second interference fringe by reflecting the light from the light source part that has been reflected on the substrate surface of the master substrate 101 and by guiding the reflection, once again, to the substrate surface side. As a result, a resist pattern based on the first and second interference fringes is formed on the substrate surface of the master substrate 101.
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Inventors:
OUE YUKI (JP)
Application Number:
PCT/JP2018/023453
Publication Date:
December 26, 2019
Filing Date:
June 20, 2018
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G02B5/18
Foreign References:
| JP2006171565A | 2006-06-29 | |||
| JP2002040220A | 2002-02-06 | |||
| JPH08313713A | 1996-11-29 | |||
| JPH0634807A | 1994-02-10 | |||
| JP2014215375A | 2014-11-17 |
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu et al. (JP)
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