Title:
DEVICE AND METHOD FOR RECYCLING DEVELOPER
Document Type and Number:
WIPO Patent Application WO/2019/208837
Kind Code:
A1
Abstract:
A developer recycling device according to the present invention comprises: a waste developer supply means for supplying a waste developer recovered after a developing process; a recycled developer generating means for receiving the waste developer supplied from the waste developer supply means and separating/removing photoresist by using the difference in specific gravity between the developer and the photoresist inside the waste developer, thereby generating a recycled developer by separating the photoresist from the waste developer; and a recycled developer supply means for supplying the recycled developer in the developing process. In addition, a developer recycling method according to the present invention comprises: a waste developer supply step of a waste developer supply means supplying a waste developer recovered after a developing process to a waste developer generating means; a recycled developer generating step of the waste developer generating means separating/removing photoresist by using the difference in specific gravity between the developer and the photoresist inside the supplied waste developer, thereby generating a recycled developer by separating the photoresist from the waste developer; and a recycled developer supply step of a recycled developer supply means supplying the generated recycled developer in the developing process.
Inventors:
CHO MYUNG-KOOK (KR)
PARK KYUNG-YONG (KR)
PARK KYUNG-YONG (KR)
Application Number:
PCT/KR2018/004670
Publication Date:
October 31, 2019
Filing Date:
April 23, 2018
Export Citation:
Assignee:
CHO MYUNG KOOK (KR)
International Classes:
G03F7/32; G03F7/00; G03F7/06; G03F7/20; G03F7/38
Foreign References:
| KR100613401B1 | 2006-08-17 | |||
| JP2006318997A | 2006-11-24 | |||
| KR20090094217A | 2009-09-04 | |||
| JP2003033760A | 2003-02-04 | |||
| KR20090015784A | 2009-02-12 | |||
| KR20180116660A | 2018-10-25 |
Attorney, Agent or Firm:
KIM, Hyun-Soo (KR)
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