Title:
A DEVICE AND METHOD FOR STACKED MULTI-LEVEL UNCOUPLED ELECTROSTATIC ACTUATORS
Document Type and Number:
WIPO Patent Application WO2004074167
Kind Code:
A3
Abstract:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).
Inventors:
ELATA DAVID (IL)
BOCHOBZA-DEGANI OFIR (IL)
NEMIROVSKY YAEL (IL)
BOCHOBZA-DEGANI OFIR (IL)
NEMIROVSKY YAEL (IL)
Application Number:
PCT/IL2004/000143
Publication Date:
March 10, 2005
Filing Date:
February 15, 2004
Export Citation:
Assignee:
TECHNION RES & DEV FOUNDATION (IL)
ELATA DAVID (IL)
BOCHOBZA-DEGANI OFIR (IL)
NEMIROVSKY YAEL (IL)
ELATA DAVID (IL)
BOCHOBZA-DEGANI OFIR (IL)
NEMIROVSKY YAEL (IL)
International Classes:
G02B5/08; H02N1/00; B81B; (IPC1-7): G02B5/08
Foreign References:
| US6038056A | 2000-03-14 | |||
| US6480320B2 | 2002-11-12 |
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