Title:
DEVICE AND METHOD FOR TEMPERING OBJECTS IN A TREATMENT CHAMBER
Document Type and Number:
WIPO Patent Application WO/2009/135685
Kind Code:
A3
Abstract:
The invention relates to a device (1) and to a method for tempering objects (2, 15). According to the invention, a temporary process box (11) is used to overcome the disadvantages of tempering processes previously known, in particular to achieve a high level of reproducibility and a high throughput during the tempering process, at the same time reducing the investment costs such that overall, the entire tempering process is carried out in a highly economical manner.
Inventors:
PALM JOERG (DE)
BAUMBACH JOERG (DE)
KARG FRANZ (DE)
FUERFANGER MARTIN (DE)
BAUMBACH JOERG (DE)
KARG FRANZ (DE)
FUERFANGER MARTIN (DE)
Application Number:
PCT/EP2009/003301
Publication Date:
March 17, 2011
Filing Date:
May 08, 2009
Export Citation:
Assignee:
SAINT GOBAIN (FR)
PALM JOERG (DE)
BAUMBACH JOERG (DE)
KARG FRANZ (DE)
FUERFANGER MARTIN (DE)
PALM JOERG (DE)
BAUMBACH JOERG (DE)
KARG FRANZ (DE)
FUERFANGER MARTIN (DE)
International Classes:
H01L31/18; F27B17/00; H01L21/324
Domestic Patent References:
| WO2001009961A2 | 2001-02-08 | |||
| WO2001029901A2 | 2001-04-26 |
Foreign References:
| US20050115947A1 | 2005-06-02 | |||
| US20030038127A1 | 2003-02-27 |
Attorney, Agent or Firm:
LENDVAI, Thomas (Glasstrasse 1, Herzogenrath, DE)
Download PDF: