Title:
EXPOSURE/DRAWING DEVICE AND EXPOSURE/DRAWING METHOD
Document Type and Number:
WIPO Patent Application WO/2013/136959
Kind Code:
A1
Abstract:
Disclosed is an exposure/drawing device whereby, when continuously carrying out a plurality of jobs, unnecessary line discontinuance can be suppressed, while avoiding unwanted exposure processing as far as possible. There are provided: exposure processing execution means wherein respective items of substrate information are set, and whereby respective exposure processes are sequentially carried out on a substrate in accordance with a plurality of exposure processing requests for exposure processing; detection means that detects the substrate information of a substrate that is to be subjected to exposure processing; and comparison means that compares the detected substrate information with substrate information during execution that was set in the exposure processing request. If, based on the comparison result, it is found that the detected substrate information of the substrate that is next to be subjected to exposure processing is the same as the information of the substrate whose processing is currently being executed, the exposure processing request that is currently being executed is continued with in respect of the substrate that is next to be subjected to exposure processing. If it is found that the detected substrate information is different from the substrate information that is currently being executed but the substrate information that was set in the next exposure processing request is the same, execution of the next exposure processing request is commenced on termination of the exposure processing request that is currently being executed.
More Like This:
Inventors:
HASHIGUCHI AKIHIRO (JP)
Application Number:
PCT/JP2013/054816
Publication Date:
September 19, 2013
Filing Date:
February 25, 2013
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/20; H01L21/027
Foreign References:
| JP2008277478A | 2008-11-13 | |||
| JP2008083478A | 2008-04-10 | |||
| JP2003098677A | 2003-04-04 | |||
| JP2006139087A | 2006-06-01 | |||
| JP2000323384A | 2000-11-24 | |||
| JP2003091072A | 2003-03-28 | |||
| JP2003280838A | 2003-10-02 | |||
| JPH11162827A | 1999-06-18 |
Attorney, Agent or Firm:
NAKAJIMA, Jun et al. (JP)
Nakajima 淳 (JP)
Nakajima 淳 (JP)
Download PDF: