Title:
WASHING/DRYING DEVICE, SCREENING DEVICE, WASHING/DRYING METHOD, AND SCREENING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/080083
Kind Code:
A1
Abstract:
In the disposition of a washing apparatus and a drying apparatus, there has been the risk of not being able to effectively use the installation space. This washing/drying device (30) for plates having a biochip is provided with a washing apparatus (310), which washes the plates (60), and a drying apparatus (320), which dries the plates (60), and the drying apparatus (320) is provided above the washing apparatus (310).
Inventors:
ISAMI TADAO (JP)
HAMASHIMA MUNEKI (JP)
UEDA TAKEHIKO (JP)
HAMASHIMA MUNEKI (JP)
UEDA TAKEHIKO (JP)
Application Number:
PCT/JP2014/081059
Publication Date:
June 04, 2015
Filing Date:
November 25, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N35/02; G01N33/53; G01N37/00
Foreign References:
| JPS6053850A | 1985-03-27 | |||
| JP2004239778A | 2004-08-26 | |||
| JP2013533469A | 2013-08-22 | |||
| JP2003297886A | 2003-10-17 | |||
| GB2225223A | 1990-05-30 | |||
| JPS5267391A | 1977-06-03 | |||
| JPS62242858A | 1987-10-23 | |||
| JPH08122224A | 1996-05-17 | |||
| JPS6053850A | 1985-03-27 |
Other References:
See also references of EP 3076182A4
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
Tatsuo Egami (JP)
Tatsuo Egami (JP)
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