Title:
DEVICE FOR SETTING IMAGE ACQUISITION CONDITIONS, AND COMPUTER PROGRAM
Document Type and Number:
WIPO Patent Application WO/2012/014363
Kind Code:
A1
Abstract:
The present invention relates to a device (303) for setting image acquisition conditions for charged particle beam devices or the like. An image integration unit (402) forms a plurality of images with a number of different integrations (number of integrations 2, 4...N) from one image (number of integrations N) acquired in advance. A pattern matching unit (403) matches the patterns of each of the plurality of images having a number of different integrations with template images registered in advance and then finds a score that shows the degree of matching between images. A selection unit (407) selects a number of integrations such that any variation in the scores is contained within a prescribed allowable range. The selected number of integrations is stored in a recipe of the device. Thus, it is possible to determine the number of integrations in the recipes without having to operate the device, and to set image acquisition conditions so as to allow a minimization of the processing time while maintaining a sufficient S / N ratio.
Inventors:
YAMADA, Yukari (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
山田 由香利 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
山田 由香利 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社 日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2011/003215
Publication Date:
February 02, 2012
Filing Date:
June 08, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMADA, Yukari (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社 日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
YAMADA, Yukari (HITACHI HIGH-TECHNOLOGIES CORPORATION 882, Oaza Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/22; G01B15/00; G01B15/04
Attorney, Agent or Firm:
INOUE, Manabu et al. (6-1, Marunouchi 1-chome, Chiyoda-k, Tokyo 20, 〒1008220, JP)
Claims:
Previous Patent: CHARGED PARTICLE BEAM DEVICE
Next Patent: CHARGER FOR ELECTRIC PROPULSION VEHICLES AND LEAKAGE CONFIRMATION METHOD APPLIED TO SAME
Next Patent: CHARGER FOR ELECTRIC PROPULSION VEHICLES AND LEAKAGE CONFIRMATION METHOD APPLIED TO SAME