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Patent Searching and Data


Title:
DEVICE FOR SHAPING AN ELECTRON BEAM, METHOD FOR PRODUCING SAID DEVICE AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO1999063566
Kind Code:
A3
Abstract:
The invention relates to an extremely low-capacitance device for forming an electron beam. The device is based on a ceramic body having a monolithic multilayer structure. The ceramic body is produced using LTCC technology, whereby said method is modified in a targeted manner. The body is made of presintered ceramic layers, whose lateral shrinkage is suppressed. The through holes of the electrodes for the electron beam are thus exactly arranged coaxially and tolerances for the dimensions of the electrodes are decoupled from shrinkage during sintering. Such a device makes it possible to focus the electron beam of an electron gun and modulate its intensity.

Inventors:
BURKHARDT KLAUS (DE)
ECKHARDT WOLFGANG (DE)
GOHLKE SILVIA (DE)
MAENNER RUTH (DE)
WERSING WOLFRAM (DE)
Application Number:
DE9901610W
Publication Date:
August 24, 2000
Filing Date:
June 01, 1999
Export Citation:
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Assignee:
SIEMENS AG (DE)
BURKHARDT KLAUS (DE)
ECKHARDT WOLFGANG (DE)
GOHLKE SILVIA (DE)
MAENNER RUTH (DE)
WERSING WOLFRAM (DE)
International Classes:
H01J3/02; H01J9/18; H01J37/12; (IPC1-7): H01J29/48; H01J3/02
Foreign References:
US5661363A1997-08-26
US5367218A1994-11-22
DE19646369A11998-05-14
US5443786A1995-08-22
DE4419764C11995-12-21
DD275156A31990-01-17
DE3837300A11990-05-23
EP0388980A21990-09-26
US5534743A1996-07-09
Other References:
R.BAUER ET AL: "Realization of LTCC-Multilayer with Special Cavity Applications", SPIE, PROC.1997 INT. SYMP ON MICROELECTRONICS, vol. 3235, 14 October 1997 (1997-10-14) - 16 October 1997 (1997-10-16), Philadelphia, pages 659 - 664, XP002122488
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