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Title:
DEVICE FOR TREATING DISC-LIKE ARTICLES
Document Type and Number:
WIPO Patent Application WO/2010/113089
Kind Code:
A3
Abstract:
Disclosed is a device for treating a disc-like article with a fluid, the device comprising dispensing means for dispensing a fluid onto the disc-like article and a chuck for holding and rotating a disc-like article around an axis A perpendicular to the disc-like article, the chuck comprises a base body, a drive ring, and gripping members for contacting the disc-like article at its edge, wherein the gripping members are eccentrically movable with respect to the centre of the disc-like article, wherein the eccentric movement of the gripping members is driven by a drive ring, wherein the drive ring is rotatable mounted to the base body, so that the drive ring is rotatable against the base body around the axis A and thereby driving the gripping members, wherein the relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.

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Inventors:
OBWEGER RAINER (AT)
KUMNIG FRANZ (AT)
WIRNSBERGER THOMAS (AT)
Application Number:
PCT/IB2010/051315
Publication Date:
March 31, 2011
Filing Date:
March 25, 2010
Export Citation:
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Assignee:
LAM RES AG (AT)
LAM RES CORP (US)
OBWEGER RAINER (AT)
KUMNIG FRANZ (AT)
WIRNSBERGER THOMAS (AT)
International Classes:
H01L21/683; B23Q3/15; F16C32/04; H01L21/02
Foreign References:
KR20090132966A2009-12-31
JP2004111902A2004-04-08
JPH1092912A1998-04-10
US5845662A1998-12-08
Other References:
See also references of EP 2415075A4
Attorney, Agent or Firm:
KONTRUS, Gerhard (Villach, AT)
Download PDF:
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