Title:
NANOWIRE/SHEET DEVICE WITH ALTERNATIVE SIDE WALL AND MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2023/108884
Kind Code:
A1
Abstract:
Disclosed are a nanowire/sheet device and a manufacturing method therefor, and electronic equipment comprising the nanowire/sheet device. According to embodiments, the nanowire/sheet device comprises: a substrate; a nanowire/sheet spaced apart from the surface of the substrate and extending in a first direction; a source/drain layer located at two opposite ends of the nanowire/sheet in the first direction and connected to the nanowire/sheet; a gate stack extending in a second direction intersecting the first direction to surround the nanowires/sheet; and a first side wall disposed on a sidewall of the gate stack, wherein the first side wall comprises a continuously extending material layer having a first portion along the surface of the nanowire/sheet, a second portion along a sidewall of the source/drain layer facing the gate stack, and a third portion along the sidewall of the gate stack facing the source/drain layer, with a slot or interface between the second portion and the third portion.
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Inventors:
ZHU HUILONG (US)
Application Number:
PCT/CN2022/076616
Publication Date:
June 22, 2023
Filing Date:
February 17, 2022
Export Citation:
Assignee:
INST OF MICROELECTRONICS CAS (CN)
International Classes:
H01L29/06; H01L21/336; H01L29/78
Foreign References:
| CN109390226A | 2019-02-26 | |||
| CN112018186A | 2020-12-01 | |||
| US20180090586A1 | 2018-03-29 | |||
| US20200066894A1 | 2020-02-27 | |||
| CN111477548A | 2020-07-31 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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