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Title:
DIAMOND ELECTRON EMISSION CATHODE, ELECTRON EMISSION SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/135093
Kind Code:
A1
Abstract:
It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode includes a sharpened section and a heating section. The diamond electron emission cathode has a columnar shape having the sharpened section having an electron emission section and is formed by at least two types of semiconductor having different electric characteristics. One of the types constituting the semiconductor is an n-type semiconductor containing 2 × 1015 cm-3 of n-type impurities or above and the other type is a p-type semiconductor containing 2 × 1015 cm-3 of p-type impurities or above. The p-type semiconductor is in contact with the n-type semiconductor. A pair of current introduction terminals directly heats the heating section in parallel to the contact surface and emits a part of the introduced electrons from the electron emission section.

Inventors:
Ueda, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Yamamoto, Yoshiyuki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Application Number:
PCT/JP2006/312262
Publication Date:
December 21, 2006
Filing Date:
June 19, 2006
Export Citation:
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Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 54100, JP)
Ueda, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Yamamoto, Yoshiyuki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
International Classes:
H01J1/15; H01J37/06; H01J37/305
Foreign References:
JPH0794077A
JP2004119018A
JP2005108634A
JP2004119019A
JP2005108637A
JPS62140332A
JPH09199001A
JPH0636680A
JPH10312735A
Other References:
NANBA A. ET AL.: 'Rin dope Diamond Handotai no Sakusei to Denshi Emitter eno Oyo' SEI TECHNICAL REVIEW, SUMITOMO ELECTRIC INDUSTRIES, LTD. vol. 166, March 2005, pages 38 - 44, XP003006925
See also references of EP 1892740A1
Attorney, Agent or Firm:
Sakai, Masami (Akasaka Office Heights, 13-5 Akasaka 4-chom, Minato-ku Tokyo 52, 10700, JP)
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