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Title:
DIAMOND ELECTRON EMISSION CATHODE, ELECTRON EMISSION SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/135094
Kind Code:
A1
Abstract:
It is possible to provide an electron emission cathode, an electron emission source having a high-luminance and narrow energy width by using diamond and an electronic device using them. The diamond electron discharge cathode has a monocrystal diamond at least at a part of it. The diamond electron emission cathode has a columnar shape including a sharpened section and a heating section. The sharpened section has an electron emission section. The electron emission section and the heating section are formed by diamond semiconductor, which is formed by a p-type semiconductor containing 2 × 1015 cm-3 of p-type impurities or above. The electron emission section has the semiconductor. A metal layer is formed on the surface of the electron emission cathode. The metal layer exists at least at a part of the heating section. The distance from the electron emission section to the position nearest to the end of the metal layer is 500 μm. A pair of current introduction terminals supplies current to the heating section to heat the heating section. A part of the introduced electrons is emitted from the electron emission section.

Inventors:
Yamamoto, Yoshiyuki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Ueda, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Application Number:
PCT/JP2006/312263
Publication Date:
December 21, 2006
Filing Date:
June 19, 2006
Export Citation:
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Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 54100, JP)
Yamamoto, Yoshiyuki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Ueda, Akihiko c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Nishibayashi, Yoshiki c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
Imai, Takahiro c/o Itami Works of Sumitomo Electric Industries Ltd. (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 66400, JP)
International Classes:
H01J1/15; H01J37/06; H01J37/305
Foreign References:
JPS62140332A
JP2005108637A
JP2005135852A
JPS647450A
JP2002075171A
JPH09199001A
Other References:
See also references of EP 1892742A1
Attorney, Agent or Firm:
Sakai, Masami (Akasaka Office Heights, 13-5 Akasaka 4-chom, Minato-ku Tokyo 52, 10700, JP)
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