Title:
DIAMOND ELECTRON RADIATION CATHODE, ELECTRON SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSER
Document Type and Number:
WIPO Patent Application WO/2008/001805
Kind Code:
A1
Abstract:
Intended is to provide an electron radiation cathode of a high brightness, low energy
dispersion and a long lifetime. Also intended is to provide a diamond electron
radiation cathode, which can be sufficiently stably gripped, which is sharpened
at its leading end and which is improved in a field intensity. The diamond electron
radiation cathode (110) is characterized in that it is divided into at least three
regions, that is, a leading end region (203) for irradiating a column-shaped
leading end with electrons, a trailing end region (201) confronting in the longitudinal
direction and adapted to be gripped, and a radially thinned intermediate region
(202), in that the trailing end region has a sectional area of 0.2 mm2,
in that the leading region has a sharpened leading end, and in that the radially
thinned intermediate region has a sectional area of 0.1 mm2 at most.
Inventors:
YAMAMOTO, Yoshiyuki (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
UEDA, Akihiko (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
UEDA, Akihiko (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
Application Number:
JP2007/062885
Publication Date:
January 03, 2008
Filing Date:
June 27, 2007
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33, Kitahama 4-chome Chuo-ku, Osaka-sh, Osaka 41, 5410041, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
YAMAMOTO, Yoshiyuki (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
UEDA, Akihiko (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
YAMAMOTO, Yoshiyuki (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北一丁目１番１号 住友電気工業株式会社 伊丹製作所内 Hyogo, 6640016, JP)
UEDA, Akihiko (1-1, Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
International Classes:
H01J1/304; H01J37/073; H01L21/027
Attorney, Agent or Firm:
SAKAI, Masami et al. (Akasaka Office Heights, 13-5 Akasaka 4-chome, Minato-k, Tokyo 52, 1070052, JP)
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