Title:
DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/035662
Kind Code:
A1
Abstract:
This invention provides a diamond electron source comprising one sharp-pointed part as an electron emission point for use in electron beam equipment such as an electron microscope, at one end of a columnar diamond single crystal having such a size that makes it difficult to coat a resist in a microfabrication process, and a method for manufacturing the same. One end of a columnar diamond single crystal (10) is polished to form a smooth flat surface (11), and a ceramic layer (12) is formed on the smooth flat surface (11). A thin film layer (14) having a predetermined shape is deposited on the ceramic layer (12) by using a focused ion beam apparatus. Thereafter, the ceramic layer (12) is patterned by etching using the thin film layer (14) as a mask. One sharp-pointed part is formed at the one end of the columnar diamond single crystal (10) by dry etching using the formed ceramic mask.
Inventors:
UEDA, Akihiko (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
YAMAMOTO, Yoshiyuki (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
YAMAMOTO, Yoshiyuki (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
山本 喜之 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
Application Number:
JP2007/068058
Publication Date:
March 27, 2008
Filing Date:
September 18, 2007
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES, LTD. (5-33 Kitahama 4-chome, Chuo-ku Osaka-sh, Osaka 41, 5410041, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
UEDA, Akihiko (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
YAMAMOTO, Yoshiyuki (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
住友電気工業株式会社 (〒41 大阪府大阪市中央区北浜四丁目５番３３号 Osaka, 5410041, JP)
UEDA, Akihiko (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
植田 暁彦 (〒16 兵庫県伊丹市昆陽北１丁目１番１号 住友電気工業株式会社伊丹製作所内 Hyogo, 6640016, JP)
YAMAMOTO, Yoshiyuki (1-1 Koyakita 1-chome, Itami-sh, Hyogo 16, 6640016, JP)
International Classes:
H01J9/02; H01J1/304; H01J9/02; H01J1/30
Attorney, Agent or Firm:
NAKANO, Minoru et al. (1-3 Shimaya 1-chome, Konohana-ku,Osaka-sh, Osaka 24, 5540024, JP)