DIAMOND SUBSTRATE HAVING PIEZOELECTRIC THIN FILM, AND METHOD FOR MANUFACTURING IT

Title:

DIAMOND SUBSTRATE HAVING PIEZOELECTRIC THIN FILM, AND METHOD FOR MANUFACTURING IT

Document Type and Number:

WIPO Patent Application WO/2002/042527

Kind Code:

A1

Abstract:

A surface acoustic wave element usable in a high frequency band, a diamond substrate having a piezoelectric thin film to be used in an optical element material, and a method for manufacturing it. The diamond substrate can be obtained by forming a thin film of Li(NbxTa1-x)03 (0 $m(F) X $m(F) 1) over a gas-phase synthesized polycrystalline diamond base material of (110) orientation covered on its surface with an amorphous layer. If the diamond substrate thus having the piezoelectric thin film is used, it is possible to provide the surface acoustic wave element having a high propagation velocity.

Inventors:

TATSUMI NATSUO (JP)
IMAI TAKAHIRO (JP)

Application Number:

PCT/JP2001/010106

Publication Date:

May 30, 2002

Filing Date:

November 19, 2001

Export Citation:

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Assignee:

SUMITOMO ELECTRIC INDUSTRIES (JP)
TATSUMI NATSUO (JP)
IMAI TAKAHIRO (JP)

International Classes:

C23C14/28; C30B29/04; H03H3/08; H03H9/02; H03H9/25; (IPC1-7): C30B29/04

Foreign References:

JPH08154033A	1996-06-11
JPH0578200A	1993-03-30
JPH0734223A	1995-02-03

Other References: