Title:
DIAMOND THIN FILM-BASED SEAWATER PRESSURE SENSOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/024857
Kind Code:
A1
Abstract:
A diamond thin film-based seawater pressure sensor, comprising a base (5), a substrate (3), an insulating layer (6), a pressure sensitive layer (1), electrodes (2) and a metal casing (4). The substrate (3) is located at a top surface (51) of the base (5) and is internally formed with a stress chamber (31); the insulating layer (6) is located at a top surface of the substrate (3) and is located directly above the stress chamber (31); the pressure sensitive layer (1) is located at a top surface of the insulating layer (6) and is four blocks of thin film that are completely identical in size, structure and composition and that are composed of monocrystalline or polycrystalline boron doped diamond; the electrodes (2) comprise four electrodes which are respectively disposed on the four blocks of thin film that form the pressure sensitive layer (1); the metal casing (4) is mounted at the top surface of the substrate (3) and encapsulates the insulating layer (6), the pressure sensitive layer (1) and the electrodes (2) therein, and hydraulic oil (41) is encapsulated in a cavity formed surrounding the metal casing (4). The seawater pressure sensor may inhibit the instability and signal drift of the sensor structure, and improve the sensitivity and stability of the response of the sensor to seawater pressure. A preparation method of a sensor for detecting seawater pressure.
Inventors:
GUO FENGXIANG (CN)
GAI ZHIGANG (CN)
ZHANG TAO (CN)
ZHANG MEI (CN)
HU DING (CN)
LIU SHOUSHENG (CN)
CAO LIN (CN)
WANG SHAOYAN (CN)
CHAI XU (CN)
WANG YIBAO (CN)
GAI ZHIGANG (CN)
ZHANG TAO (CN)
ZHANG MEI (CN)
HU DING (CN)
LIU SHOUSHENG (CN)
CAO LIN (CN)
WANG SHAOYAN (CN)
CHAI XU (CN)
WANG YIBAO (CN)
Application Number:
PCT/CN2019/097502
Publication Date:
February 06, 2020
Filing Date:
July 24, 2019
Export Citation:
Assignee:
INST OCEANOGRAPHIC INSTR SHANDONG ACADEMY OF SCIENCES (CN)
International Classes:
G01L7/08; G01L9/06
Foreign References:
| CN108827523A | 2018-11-16 | |||
| CN208568143U | 2019-03-01 | |||
| CN201149534Y | 2008-11-12 | |||
| CN104122014A | 2014-10-29 | |||
| CN107631809A | 2018-01-26 | |||
| CN201247122Y | 2009-05-27 | |||
| JPH0363538A | 1991-03-19 | |||
| JPH0585856A | 1993-04-06 | |||
| EP3193148A1 | 2017-07-19 |
Attorney, Agent or Firm:
QINGDAO ARTFIX PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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