Title:
DIAPHRAGM BAROMETER
Document Type and Number:
WIPO Patent Application WO/2013/002180
Kind Code:
A1
Abstract:
In order to basically solve the problem of the time-dependent change of a standard atmospheric pressure including a vacuum in a standard pressure chamber of a diaphragm barometer, provided is a diaphragm barometer in which even if the atmospheric pressure in a standard pressure chamber of the diaphragm barometer fluctuates due to, for example, the time-dependent change, a standard atmospheric pressure in the standard pressure chamber is measured and can be calibrated.
In the diaphragm barometer having a standard pressure chamber, a heat-conduction-type barometric sensor is equipped in the standard pressure chamber, and the atmospheric pressure in the standard pressure chamber is measured constantly or as necessary to use the measured atmospheric pressure as a standard atmospheric pressure. The heat-conduction-type barometric sensor uses a silicon substrate and includes an absolute temperature sensor. The atmospheric pressure in the standard pressure chamber can also be adjusted to around a desired atmospheric pressure.
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Inventors:
KIMURA MITSUTERU (JP)
ISHIHARA SEIJI (JP)
ISHIHARA SEIJI (JP)
Application Number:
PCT/JP2012/066159
Publication Date:
January 03, 2013
Filing Date:
June 25, 2012
Export Citation:
Assignee:
MD INNOVATIONS KK (JP)
PURERON JAPAN CO LTD (JP)
KIMURA MITSUTERU (JP)
ISHIHARA SEIJI (JP)
PURERON JAPAN CO LTD (JP)
KIMURA MITSUTERU (JP)
ISHIHARA SEIJI (JP)
International Classes:
G01L9/04; G01L9/12; G01L21/00; G01L21/14
Foreign References:
| JP2009258109A | 2009-11-05 | |||
| JP2011069733A | 2011-04-07 | |||
| JP2009079965A | 2009-04-16 |
Attorney, Agent or Firm:
FUKUMORI, Hisao (JP)
Hisao Fukumori (JP)
Hisao Fukumori (JP)
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Claims: