DIAPHRAGM VALVE FOR VACUUM EVACUATION SYSTEM

Title:

DIAPHRAGM VALVE FOR VACUUM EVACUATION SYSTEM

Document Type and Number:

WIPO Patent Application WO/2004/074722

Kind Code:

A1

Abstract:

A diaphragm valve for a vacuum evacuation system applicable to a semiconductor manufacturing system. Corrosion of members due to deposition/adhesion of products produced by thermolysis of gas, clogging due to products, and seat leakage are prevented. This diaphragm valve leads to reduction in the scale of the vacuum evacuation system facility, reduction in cost, and reduction in diameter of piping of the vacuum evacuation system for the purpose of decrease in vacuum evacuation time. Specifically, the diaphragm valve (1) comprises a body (2) having an inlet passage (6), an outlet passage (7), and a valve seat (8) provided between the passages, a diaphragm (3) which is provided to the body (2) and can be separated from the valve seat (8) and brought into contact with the same, and drive means (4) provided to the body (2) and adapted to separate the diaphragm (3) from the valve seat (8) and to bring the diaphragm (3) into contact with the same. The portion (25) of the body (2) and the portion (25) of the diaphragm (3) both coming into contact with a fluid are coated with a synthetic resin coating (5) of predetermined thickness.

Inventors:

OHMI TADAHIRO (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
KITANO MASAFUMI (JP)
MORIMOTO AKIHIRO (JP)

Application Number:

PCT/JP2004/001346

Publication Date:

September 02, 2004

Filing Date:

February 09, 2004

Export Citation:

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Assignee:

FUJIKIN KK (JP)
OHMI TADAHIRO (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
KITANO MASAFUMI (JP)
MORIMOTO AKIHIRO (JP)

International Classes:

F04B45/04; F16K7/16; F16K51/02; (IPC1-7): F16K7/12; F16K27/00

Foreign References:

JPH11118049A	1999-04-30
JP2002323147A	2002-11-08
JP3343313B2	2002-11-11
US5413311A	1995-05-09
US5520213A	1996-05-28
JP2003166660A	2003-06-13

Other References: