Title:
DIAZADIENYL COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR PRODUCING THIN FILM, AND DIAZADIENE COMPOUND
Document Type and Number:
WIPO Patent Application WO/2016/143456
Kind Code:
A1
Abstract:
A diazadienyl compound represented by general formula (I). (In the formula, R1 and R2 each independently represent a linear or branched alkyl group having 1-6 carbon atoms, R3 represents a hydrogen atom or a linear or branched alkyl group having 1-6 carbon atoms, M represents a metal atom or silicon atom, and n represents the valence of the metal atom or silicon atom represented by M.)
Inventors:
YOSHINO TOMOHARU (JP)
ENZU MASAKI (JP)
NISHIDA AKIHIRO (JP)
SUGIURA NANA (JP)
SAKURAI ATSUSHI (JP)
OKABE MAKOTO (JP)
ENZU MASAKI (JP)
NISHIDA AKIHIRO (JP)
SUGIURA NANA (JP)
SAKURAI ATSUSHI (JP)
OKABE MAKOTO (JP)
Application Number:
PCT/JP2016/054116
Publication Date:
September 15, 2016
Filing Date:
February 12, 2016
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07C251/08; C23C16/18; C07F15/06
Domestic Patent References:
WO2011123675A1 | 2011-10-06 | |||
WO2015065823A1 | 2015-05-07 |
Foreign References:
US20130295298A1 | 2013-11-07 | |||
JP2013545755A | 2013-12-26 | |||
JP2013204048A | 2013-10-07 | |||
JP2013189696A | 2013-09-26 |
Other References:
J. REINHOLD ET AL.: "CNDO/2-Berechnungen zur elektronischen Struktur von Mono-Diimin-Cobalt (III)-Systemen", Z. PHYS. CHEMIE, vol. 261, no. 5, 1980, Leipzig, pages 989 - 994, XP009505920
SANG BOK KIM ET AL.: "Synthesis of N-Heterocyclic Stannylene (Sn(II)) and Germylene (Ge(II)) and a Sn(II) Amidinate and Their Application as Precursors for Atomic Layer Deposition", CHEMISTRY OF MATERIALS, vol. 26, no. 10, 2014, pages 3065 - 3073, XP055308910
See also references of EP 3266763A4
SANG BOK KIM ET AL.: "Synthesis of N-Heterocyclic Stannylene (Sn(II)) and Germylene (Ge(II)) and a Sn(II) Amidinate and Their Application as Precursors for Atomic Layer Deposition", CHEMISTRY OF MATERIALS, vol. 26, no. 10, 2014, pages 3065 - 3073, XP055308910
See also references of EP 3266763A4
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
Michiharu Soga (JP)
Michiharu Soga (JP)
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