Title:
DICARBOXYLIC ACID MONOESTER COMPOUND, METHOD FOR PRODUCING SAME AND POLYMER THEREOF
Document Type and Number:
WIPO Patent Application WO/2004/087636
Kind Code:
A1
Abstract:
A dicarboxylic acid monoester compound is disclosed which is represented by the following general formula (1) or (2): (1) (2) (wherein R1 and R2 represent alkyl chains having 0-8 carbon atoms, R3 represents a substituent having at least two or more alicyclic structures, R4 and R5 represent hydrogen atoms or alkyl groups having 1-8 carbon atoms). A method for producing such a dicarboxylic acid monoester compound and a polymer obtained from such a compound are also disclosed. The dicarboxylic acid monoester compound is useful as a resist material.
Inventors:
IWASHITA JYUN (JP)
TACHIKAWA TOSHIKAZU (JP)
YOSHIDA MASATOSHI (JP)
ARAKAWA MOTOHIRO (JP)
UGAMURA TADAYOSHI (JP)
TACHIKAWA TOSHIKAZU (JP)
YOSHIDA MASATOSHI (JP)
ARAKAWA MOTOHIRO (JP)
UGAMURA TADAYOSHI (JP)
Application Number:
PCT/JP2004/004081
Publication Date:
October 14, 2004
Filing Date:
March 24, 2004
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
NIPPON CATALYTIC CHEM IND (JP)
IWASHITA JYUN (JP)
TACHIKAWA TOSHIKAZU (JP)
YOSHIDA MASATOSHI (JP)
ARAKAWA MOTOHIRO (JP)
UGAMURA TADAYOSHI (JP)
NIPPON CATALYTIC CHEM IND (JP)
IWASHITA JYUN (JP)
TACHIKAWA TOSHIKAZU (JP)
YOSHIDA MASATOSHI (JP)
ARAKAWA MOTOHIRO (JP)
UGAMURA TADAYOSHI (JP)
International Classes:
G03F7/039; C07C67/12; C07C69/533; C07C69/593; C08F22/16; (IPC1-7): C07C69/593; C07C67/08; C08F22/16
Foreign References:
| JPH10239847A | 1998-09-11 | |||
| JPH06279543A | 1994-10-04 | |||
| JP2002107918A | 2002-04-10 | |||
| JPS4812872B1 | 1973-04-24 |
Attorney, Agent or Firm:
Sakai, Hiroaki (Kasumigaseki Building 2-5, Kasumigaseki 3-chom, Chiyoda-ku Tokyo, JP)
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