Title:
DIFFERENTIAL PRESSURE DETECTION ELEMENT, FLOW RATE MEASUREMENT DEVICE, AND METHOD FOR MANUFACTURING DIFFERENTIAL PRESSURE DETECTION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/154424
Kind Code:
A1
Abstract:
The present invention is provided with: a supporting substrate 11 having an opening 111; a cantilevered part 12 which is cantilevered by the supporting substrate 11 so as to protrude to the opening 111; a diffusion layer 13, including piezoresistive parts 131, 132, which is provided at the fixed end 121 of the cantilevered part 12; a pair of wiring parts 16, 17 which are electrically connected to the diffusion layer 13; a first insulating layer 14 which covers the diffusion layer 13; and a second insulating layer 15 which is stacked on the first insulating layer 14. The linear expansion coefficient of the first insulating layer 14 is small relative to the linear expansion coefficient of the material forming the cantilevered part 12. The linear expansion coefficient of the second insulating layer 15 is large relative to the linear expansion coefficient of the first insulating layer 14.
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Inventors:
ARAI HAYATO (JP)
SHIOIRI TATSUYA (JP)
TAKAYAMA NAOKI (JP)
SHIOIRI TATSUYA (JP)
TAKAYAMA NAOKI (JP)
Application Number:
PCT/JP2017/003593
Publication Date:
September 14, 2017
Filing Date:
February 01, 2017
Export Citation:
Assignee:
FUJIKURA LTD (JP)
International Classes:
B81B3/00; G01L13/06; B81C1/00; G01F1/34; H01L29/84
Foreign References:
| JP5778619B2 | 2015-09-16 | |||
| JP5656191B2 | 2015-01-21 |
Other References:
See also references of EP 3428601A4
Attorney, Agent or Firm:
TOKOSHIE PATENT FIRM (JP)
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