Title:
DIFFERENTIAL PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/102073
Kind Code:
A1
Abstract:
Provided is a differential pressure sensor capable of measuring pressure fluctuations using a simple configuration. The differential pressure sensor comprises a main body in which an air chamber and an opening connecting the inside and the outside of the air chamber are formed, and a detection unit provided in the opening. The differential pressure sensor is characterized in that the detection unit has a cantilever section provided so as to be capable of tilting to close the opening, and in that a piezoresistive layer is formed in the cantilever section.
Inventors:
SHIMOYAMA ISAO (JP)
MATSUMOTO KIYOSHI (JP)
TAKAHATA TOMOYUKI (JP)
KAN TETSUO (JP)
KUWANA KENTA (JP)
TAKAHASHI HIDETOSHI (JP)
NGUYEN MINH-DUNG (JP)
MATSUMOTO KIYOSHI (JP)
TAKAHATA TOMOYUKI (JP)
KAN TETSUO (JP)
KUWANA KENTA (JP)
TAKAHASHI HIDETOSHI (JP)
NGUYEN MINH-DUNG (JP)
Application Number:
PCT/JP2012/050321
Publication Date:
August 02, 2012
Filing Date:
January 11, 2012
Export Citation:
Assignee:
UNIV TOKYO (JP)
SHIMOYAMA ISAO (JP)
MATSUMOTO KIYOSHI (JP)
TAKAHATA TOMOYUKI (JP)
KAN TETSUO (JP)
KUWANA KENTA (JP)
TAKAHASHI HIDETOSHI (JP)
NGUYEN MINH-DUNG (JP)
SHIMOYAMA ISAO (JP)
MATSUMOTO KIYOSHI (JP)
TAKAHATA TOMOYUKI (JP)
KAN TETSUO (JP)
KUWANA KENTA (JP)
TAKAHASHI HIDETOSHI (JP)
NGUYEN MINH-DUNG (JP)
International Classes:
G01L13/06; H04R21/02
Foreign References:
| JPH04208827A | 1992-07-30 | |||
| JPH04294234A | 1992-10-19 |
Other References:
HIDETOSHI TAKAHASHI ET AL.: "AIR PRESSURE SENSOR FOR AN INSECT WING", 22ND IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 25 January 2009 (2009-01-25), pages 825 - 828, XP031444421
HIDETOSHI TAKAHASHI ET AL.: "Air pressure difference on artificial insect wing with MEMS sensor", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS 2009 NENDO NENJI TAIKAI KOEN RONBUNSHU (6), 12 September 2009 (2009-09-12), pages 135 - 136, XP008172153
See also references of EP 2669648A4
HIDETOSHI TAKAHASHI ET AL.: "Air pressure difference on artificial insect wing with MEMS sensor", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS 2009 NENDO NENJI TAIKAI KOEN RONBUNSHU (6), 12 September 2009 (2009-09-12), pages 135 - 136, XP008172153
See also references of EP 2669648A4
Attorney, Agent or Firm:
YOSHIDA TADANORI (JP)
Yoshida Justice (JP)
Yoshida Justice (JP)
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Claims:
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