Title:
DIFFRACTION OPTICAL ELEMENT, PROJECTION DEVICE, AND MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/216575
Kind Code:
A1
Abstract:
Provided are: a diffraction optical element having high light utilization efficiency and capable of stably generating an optical spot of a prescribed pattern; a projection device; and a measuring device. A diffraction optical element according to the present invention is provided with: a transparent base material; recessed and projected parts that are provided in contact with one surface of the transparent base material; and a filling part that fills the recessed parts of the recessed and projected parts, covers the top surface of the projected parts of the recessed and projected parts, and planarizes the recessed and projected parts. The recessed and projected parts form two or more stages on the surface of the transparent base material. The top surfaces of the stages are parallel to each other. Among the transparent base material, the recessed and projected parts, and the filling part, the refractive indexes of at least the recessed and projected parts and the filling part with respect to incident light which enters from the normal direction of the surface of the transparent base material are different, and the refractive indexes of the transparent base material, the recessed and projected parts, and the filling part with respect to the incident light are all 2.2 or lower.
Inventors:
MIYASAKA KOJI (JP)
MURAKAMI RYOTA (JP)
MURAKAMI RYOTA (JP)
Application Number:
PCT/JP2018/018973
Publication Date:
November 29, 2018
Filing Date:
May 16, 2018
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
G02B5/18; G01B11/25; G03B21/14
Domestic Patent References:
| WO2012018017A1 | 2012-02-09 | |||
| WO2013084442A1 | 2013-06-13 | |||
| WO2010016559A1 | 2010-02-11 |
Foreign References:
| JP2006259132A | 2006-09-28 | |||
| JPH1123820A | 1999-01-29 | |||
| CN106324898A | 2017-01-11 |
Attorney, Agent or Firm:
SENMYO Kenji et al. (JP)
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