Title:
DIFFRACTIVE OPTICAL ELEMENT, MANUFACTURING METHOD THEREFOR, AND DESIGN METHOD FOR MICRO-NANO STRUCTURE OF MASTER
Document Type and Number:
WIPO Patent Application WO/2023/098897
Kind Code:
A1
Abstract:
The present application relates to the technical field of diffraction optics, and provides a diffractive optical element, a manufacturing method therefor, and a design method for a micro-nano structure of a master. The manufacturing method comprises: providing a transparent substrate; forming a first grating structure layer on the surface of one side of the transparent substrate by means of a first master; and forming, by means of a second master, a second grating structure layer on the transparent substrate on which the first grating structure layer is formed, wherein at least one of the first grating structure layer and the second grating structure layer is of an one-dimensional Dammann grating structure, and the other one is of a two-dimensional periodic grating structure. Dot matrixes respectively produced by the first grating structure layer and the second grating structure layer are combined to form a preset array dot matrix. After the double-layer grating structure layer is used, each layer of structure has the characteristics such as large morphology feature size and low structural complexity, so that the design and master processing difficulties of the diffractive optical element are greatly reduced, meanwhile, high-performance beam splitting is achieved, and a two-dimensional dot matrix is kept to have good beam splitting uniformity.
Inventors:
WANG LINGYI (CN)
WU WEIMING (CN)
LIU FENGLEI (CN)
WU WEIMING (CN)
LIU FENGLEI (CN)
Application Number:
PCT/CN2022/136316
Publication Date:
June 08, 2023
Filing Date:
December 02, 2022
Export Citation:
Assignee:
ZHEJIANG CRYSTAL OPTECH CO LTD (CN)
International Classes:
G02B5/18; G02B27/00
Foreign References:
| CN114137645A | 2022-03-04 | |||
| CN113330339A | 2021-08-31 | |||
| CN214225473U | 2021-09-17 | |||
| CN106624354A | 2017-05-10 | |||
| CN112840238A | 2021-05-25 | |||
| JP2011027818A | 2011-02-10 |
Attorney, Agent or Firm:
CHOFN INTELLECTUAL PROPERTY (CN)
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