DIFFRACTIVE OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THE SAME

Title:

DIFFRACTIVE OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THE SAME

Document Type and Number:

WIPO Patent Application WO/2021/000222

Kind Code:

A1

Abstract:

A diffractive optical element comprising at least two layers with different etching speeds for dry etching process. The diffractive optical element comprises a substrate of glass (12) and a microstructure layer (10) arranged on the substrate of glass (12). The ratio of dry etching speed in thickness direction of the substrate of glass (12) to that of the microstructure layer (10) is no more than 1: 2, preferably no more than 1: 5, more preferably no more than 1: 10 or most preferably no more than 1: 20, so that the substrate functions as an etching stop layer. The ratio of dry etching speed in horizontal direction of the substrate of glass (12) is substantial equal to that of the microstructure layer (10). The composition of glass (12) includes but not limited to Al 2O 3, alkaline material (M 2O) and alkaline earth material (MO). And the weight percentage of Al 2O 3+M 2O+MO>=5%. The height of the microstructure can be controlled with a high precision.

Inventors:

SHAN YANQUAN (CN)
ZHANG GUANGJUN (CN)
QIAN PENGXIANG (CN)
WIEGEL THOMAS (DE)

Application Number:

PCT/CN2019/094209

Publication Date:

January 07, 2021

Filing Date:

July 01, 2019

Export Citation:

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Assignee:

SCHOTT GLASS TECHNOLOGIES SUZHOU CO LTD (CN)

International Classes:

G02B5/18; G03F7/20

Foreign References:

JPH07104112A	1995-04-21
JPH06209143A	1994-07-26
JP2005091001A	2005-04-07
JP2010171265A	2010-08-05
RU2642139C1	2018-01-24
CN104583812A	2015-04-29

Other References: