Title:
DIFFUSION FURNACE
Document Type and Number:
WIPO Patent Application WO/2024/060273
Kind Code:
A1
Abstract:
Provided in the present application is a diffusion furnace, comprising a console, a vacuum pipe and a concentrator. The concentrator comprises a housing, and, arranged on the housing, a plurality of first wire sockets as well as a plurality of second wire sockets, the first wire sockets and the second wire sockets corresponding to each other on an one-to-one basis, and having wire channels arranged therebetween. The console is connected to first wires, and the vacuum pipe is connected to second wires, the first wires extending into the first wire sockets and being partially accommodated in the wire channels, and the first wires being connected to the second wires by means of the second wire sockets. According to the diffusion furnace provided in the embodiments of the present application, the working efficiency of maintenance can be improved.
Inventors:
FAN YIHAO (CN)
Application Number:
PCT/CN2022/121466
Publication Date:
March 28, 2024
Filing Date:
September 26, 2022
Export Citation:
Assignee:
TAIWAN SEMICONDUCTOR MFG CO LTD (CN)
TSMC CHINA COMPANY LTD (CN)
TSMC CHINA COMPANY LTD (CN)
International Classes:
H01R27/00; C30B31/16
Foreign References:
| CN215910827U | 2022-02-25 | |||
| CN212543284U | 2021-02-12 | |||
| CN213937314U | 2021-08-10 | |||
| CN212875279U | 2021-04-02 | |||
| CN207608661U | 2018-07-13 | |||
| CN215870624U | 2022-02-18 | |||
| CN216215690U | 2022-04-05 | |||
| CN107146991A | 2017-09-08 | |||
| CN111403928A | 2020-07-10 | |||
| US20200083687A1 | 2020-03-12 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
Download PDF:
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