Title:
DIGITAL HOLOGRAPHIC IMAGING APPARATUS AND IMAGING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/203662
Kind Code:
A1
Abstract:
According to the present invention, an illumination unit 10 irradiates an object 4 to be inspected with illumination light 12. An imaging element 20 includes a plurality of two-dimensionally arranged pixels 24, images the intensity distribution of an interference pattern formed by illumination light 14 having been affected by the object 4 to be inspected, and outputs image data S2. A defect information acquisition unit 70 acquires defect position information S3 indicating the position of a defective pixel 24d in the imaging element 20. An arithmetic unit 30 reconstructs an object image S1 representing the object 4 to be inspected on the basis of the image data S2 and the defect position information S3.
Inventors:
MATSUO KEIGO (JP)
Application Number:
PCT/JP2016/065615
Publication Date:
November 30, 2017
Filing Date:
May 26, 2016
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G03H1/00; G02B21/00
Foreign References:
| JP2013508775A | 2013-03-07 | |||
| JP2004187163A | 2004-07-02 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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