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Title:
DIGITAL HOLOGRAPHY DEVICE AND DIGITAL HOLOGRAM GENERATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/084420
Kind Code:
A1
Abstract:
A digital hologram generation method comprises: a light emission step for emitting coherent light from a light source; an imaging step for capturing the image of a hologram as an interference fringe via a detector, the interference fringe being caused by interference between an object wave and a reference wave due to the emission light from the light source; and a wavelength setting step for setting a plurality of wavelengths of illumination light for generating the hologram captured by the detector. The plurality of wavelengths set in the wavelength setting step is established so that the real image and the conjugate image of a structure to be observed, which are reproduced via prescribed computation means, satisfy the following relationship: λmax/λmin≥(1/X + 1) where λmin represents the shortest wavelength; λmax represents the longest wavelength; and X represents the magnification rate of the conjugate image set by a user to not obstruct the visibility of the corresponding real image when the conjugate image is superimposed on the real image.

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WO/2024/048800WAFER INSPECTION SYSTEM
Inventors:
TAGAWA YUSUKE (JP)
Application Number:
PCT/JP2015/070019
Publication Date:
June 02, 2016
Filing Date:
July 13, 2015
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
International Classes:
G03H1/00; G01N21/17
Domestic Patent References:
WO2010092739A12010-08-19
Foreign References:
JP2012531584A2012-12-10
US20140268105A12014-09-18
Other References:
MEMMOLO P.: "Multi-wavelength digital holography: reconstruction, synthesis and display of holograms using adaptive transformation", OPTICS LETTERS, vol. 37, no. 9, pages 1445 - 1447, XP001575318, DOI: doi:10.1364/OL.37.001445
See also references of EP 3223083A4
Attorney, Agent or Firm:
Kyoto International Patent Law Office (JP)
Patent business corporation Kyoto international patent firm (JP)
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