DILUTE CHEMICAL SOLUTION PRODUCTION DEVICE

WIPO Patent Application WO/2018/225278

A1

This dilute chemical solution production device 1 comprises a chemical solution storage tank 2, a plunger pump 4 supplying a chemical solution S from the chemical solution storage tank 2, and a chemical solution supply tube 3. A chemical solution supply means 5 for supplementing the chemical solution S to the chemical solution storage tank 2 and a purge gas supply means 6 for supplying N2 gas as a purge gas to the chemical solution storage tank 2 are in communication with the chemical solution storage tank 2, which is provided with a first manometer 7 serving as a pressure measurement means. A drain tubing 8 is connected to the head section of the plunger pump 4, and an automatically controlled air bleed valve 9, which is an air bleeding mechanism, is installed on the drain tubing 8. A second manometer 10 is installed on the chemical solution supply tube 3, and the end of the solution supply tube 3 on the downstream side serves as an injection point 11 for the chemical solution S. This dilute chemical solution production device enables stable production of a dilute chemical solution with an extremely low concentration of acid, alkali, or the like, with a simple structure.

SASAKI YUUYA (JP)

PCT/JP2017/029509

December 13, 2018

August 17, 2017

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KURITA WATER IND LTD (JP)

H01L21/304; B01J4/00

JP2014160759A	2014-09-04
JPH11253773A	1999-09-21
JPH06344533A	1994-12-20
JPS59139590U	1984-09-18
JP2004230293A	2004-08-19
JP2007209864A	2007-08-23
GB2292158A	1996-02-14
JP2015162671A	2015-09-07

HAYAKAWA Yuzi et al. (JP)

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