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Title:
DIMMER PLATE, EXPOSURE APPARATUS, METHOD OF EXPOSURE AND PROCESS FOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/053881
Kind Code:
A1
Abstract:
Dimmer plate (101a) being a dimmer plate for regulating the intensity of light from a light source, which dimmer plate has multiple high transmission factor regions of relatively high transmission factor, the high transmission factor regions each having a configuration defined so that the distribution of intensity of diffused light or focused light having passed through the dimmer plate is uniform.

Inventors:
IKEDA JUNJI (JP)
KOMATSUDA HIDEKI (JP)
Application Number:
PCT/JP2007/071105
Publication Date:
May 08, 2008
Filing Date:
October 30, 2007
Export Citation:
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Assignee:
NIKON CORP (JP)
IKEDA JUNJI (JP)
KOMATSUDA HIDEKI (JP)
International Classes:
H01L21/027; G02B5/00; G03F7/20
Foreign References:
JP2006019702A2006-01-19
JPH0846751A1996-02-16
JPS5849932A1983-03-24
JP2003273338A2003-09-26
JPH11109110A1999-04-23
JP2001102277A2001-04-13
JP2005181691A2005-07-07
JPS61107202A1986-05-26
Attorney, Agent or Firm:
HASEGAWA, Yoshiki et al. (Ginza First Bldg.10-6, Ginza 1-chom, Chuo-ku Tokyo 61, JP)
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