Title:
DIRECT-WRITE SCREEN PLATEMAKING APPARATUS AND USE METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2018/120481
Kind Code:
A1
Abstract:
A direct-write screen platemaking apparatus and a use method therefor. The direct-write screen platemaking apparatus and a focal plane control method utilize a Z-axis controller (7) to pre-establish a mapping relation between a focal plane position of a scan region that needs to be scanned in a next step and a position signal of a scan platform (2-2) and, when scanning in the next step, adjust the position of an optical lens (8) on the basis of the mapping relation, thus preventing the problem of inconsistency between a measured focal plane and an actual focal plane caused by a position deviation between an equipped displacement sensor (10) and the optical lens (8). Also provided are a method for utilizing an area of interest for exposure and a method for in-line real-time optical evenness compensation, solving the problem with service life extension for a digital micromirror device (6) and uneven distribution of energy output on the digital micromirror device (6).
Inventors:
MA LLOYD (CN)
WU JINGZHOU (CN)
WU JINGZHOU (CN)
Application Number:
PCT/CN2017/079183
Publication Date:
July 05, 2018
Filing Date:
April 01, 2017
Export Citation:
Assignee:
JIANGSU GIS LASER TECH INC (CN)
International Classes:
G03F7/20
Domestic Patent References:
| WO2008119517A2 | 2008-10-09 |
Foreign References:
| CN104865800A | 2015-08-26 | |||
| CN102368138A | 2012-03-07 | |||
| CN103744271A | 2014-04-23 | |||
| CN102566325A | 2012-07-11 | |||
| CN1877456A | 2006-12-13 | |||
| JP2001082925A | 2001-03-30 |
Other References:
See also references of EP 3564753A4
Attorney, Agent or Firm:
BEIJING HUIJIE INTELLECTUAL PROPERTY FIRM (ORDINARY PARTNERSHIP) (CN)
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