Title:
DISC-SHAPED HEATER AND COOLING PLATE ASSEMBLY FOR HEATER
Document Type and Number:
WIPO Patent Application WO/2017/115758
Kind Code:
A1
Abstract:
This electrostatic chuck heater 10 includes a plurality of heating elements 20 embedded in a disc-shaped ceramic base body 30. The electrostatic chuck heater 10 has an upper surface 12 on which a wafer is placed, the upper surface being divided into multiple zones. In each of the zones, the heating elements 20 provided with terminals 22, 24 are embedded in the ceramic base body 30. The lower surface 14 of the electrostatic chuck heater 10 is provided with a number (here, there are eight) of collective terminal regions 16 fewer than the total number of the heating elements 20. The terminals 22, 24 of all the heating elements 20 are wired to any one of the collective terminal regions 16 through the interior of the ceramic base body 30.
Inventors:
TAKEBAYASHI HIROSHI (JP)
TORII KENGO (JP)
TORII KENGO (JP)
Application Number:
PCT/JP2016/088763
Publication Date:
July 06, 2017
Filing Date:
December 26, 2016
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L21/683; H01L21/02
Foreign References:
| JP2015220368A | 2015-12-07 | |||
| JP2015109139A | 2015-06-11 | |||
| JP2015207765A | 2015-11-19 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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