Title:
DISCHARGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/068382
Kind Code:
A1
Abstract:
A discharge device comprises an outer electrode having a gas inlet at one end and a gas outlet at the other end, an inner electrode disposed inside the outer electrode, gas circulating means for circulating a gas to be processed through the space between the inner and outer electrodes, and a power supply for applying a discharge voltage between the inner and outer electrodes while circulating the gas through the space, characterized in that the space includes an annular discharging region defined by an intermediate portion in the axial direction of the outer periphery of the inner electrode and an intermediate portion in the axial direction of the inner periphery of the outer electrode and an annular discharge spreading region which is an annular space defined downstream form the discharging region by the outer periphery of the inner electrode and the inner periphery of the outer electrode and in which the gap between the inner and outer electrodes in the annular space is larger than the gap between the inner and outer electrodes in the discharging region, and the gap of the discharge spreading region is set so that discharge may occur in the discharging region when a predetermined discharge voltage is applied between the outer and inner electrodes while causing the gas to flow from the gas inlet to the gas outlet and the discharge may spread into the discharge spreading region and be sustained.
Inventors:
Tamaru, Shigeru (1-1 Uminokoen, Kanazawa-ku Yokohama-shi, Kanagawa, 236-0013, JP)
Kimura, Hideo (1480-1, Nakasone Yoshikawa-shi, Saitama, 342-0033, JP)
Kimura, Hideo (1480-1, Nakasone Yoshikawa-shi, Saitama, 342-0033, JP)
Application Number:
PCT/JP2003/001658
Publication Date:
August 21, 2003
Filing Date:
February 17, 2003
Export Citation:
Assignee:
FURREX CO., LTD. (Toranomon Pastoral, Main Bldg. 7F 1-1, Toranomon 4-chom, Minato-ku Tokyo, 105-0001, JP)
Tamaru, Shigeru (1-1 Uminokoen, Kanazawa-ku Yokohama-shi, Kanagawa, 236-0013, JP)
Kimura, Hideo (1480-1, Nakasone Yoshikawa-shi, Saitama, 342-0033, JP)
Tamaru, Shigeru (1-1 Uminokoen, Kanazawa-ku Yokohama-shi, Kanagawa, 236-0013, JP)
Kimura, Hideo (1480-1, Nakasone Yoshikawa-shi, Saitama, 342-0033, JP)
International Classes:
B01D53/32; B01J19/08; H01J17/38; (IPC1-7): B01J19/08; B01D53/32
Attorney, Agent or Firm:
Isshiki, Kensuke (Rookin-Shinbashi Bldg. 3F, 12-7 Shinbashi 2-chom, Minato-ku Tokyo, 105-0004, JP)