Title:
DISCHARGE ELECTRODE, PRODUCTION METHOD FOR DISCHARGE ELECTRODE, AND PRODUCTION METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/181416
Kind Code:
A1
Abstract:
A discharge electrode according to one perspective of the present disclosure is used in a gas laser device that excites a laser gas including fluorine via discharging, and comprises a cathode electrode that extends in one direction, and an anode electrode that extends in the one direction and that is disposed facing the cathode electrode in a discharging direction that is orthogonal to the one direction. The cathode electrode and/or the anode electrode has an electrode base material that includes a metal, and a dielectric that is provided to a pair of side surfaces of the electrode base material and that includes a first layer having voids. The porosity of the first layer is 0.5 to 25%.
Inventors:
SASAKI YOICHI (JP)
FUJIMOTO JUNICHI (JP)
FUJIMOTO JUNICHI (JP)
Application Number:
PCT/JP2022/014691
Publication Date:
September 28, 2023
Filing Date:
March 25, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/038
Foreign References:
| US20070002918A1 | 2007-01-04 | |||
| JP2003261375A | 2003-09-16 | |||
| JP2001007082A | 2001-01-12 | |||
| JP2012065547A | 2012-03-29 | |||
| JP2003060270A | 2003-02-28 | |||
| JP2001332786A | 2001-11-30 | |||
| JP2007311824A | 2007-11-29 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
Download PDF:
Previous Patent: POWER GENERATION PLANT AND SYSTEM STABILIZATION METHOD
Next Patent: IMAGING DEVICE, PROGRAM, AND METHOD
Next Patent: IMAGING DEVICE, PROGRAM, AND METHOD