Title:
DISK-TYPE MEMS VIBRATOR
Document Type and Number:
WIPO Patent Application WO/2012/020602
Kind Code:
A1
Abstract:
In order to reduce variation in resonance frequency caused by variation in the precision of dimensions for a supporting structure of a vibrator, the present invention provides an electrostatic drive-type disk-type MEMS vibrator comprising: a disk-type vibrator body (1); a pair of drive electrodes (2, 2) at a prescribed gap (g) from the peripheral section of the disk-type vibrator and arranged on both sides of the vibrator body (1) so as to face each other; a means (2a) for applying alternating current bias voltages of the same phase to the drive electrodes (2, 2); and detection means (3, 3a) that obtain outputs corresponding to the capacitance between the disk-type vibrator body (1) and the drive electrodes (2, 2); and characterized by the disk-type vibrator body (1) therein being supported by a columnar supporting structure (1a) disposed perpendicularly in the center of the disk and the cross-sectional shape of the supporting structure (1a) being non-circular.
Inventors:
SAITO TAKEFUMI (JP)
KIMURA NORITOSHI (JP)
KIMURA NORITOSHI (JP)
Application Number:
PCT/JP2011/063992
Publication Date:
February 16, 2012
Filing Date:
June 13, 2011
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO (JP)
SAITO TAKEFUMI (JP)
KIMURA NORITOSHI (JP)
SAITO TAKEFUMI (JP)
KIMURA NORITOSHI (JP)
International Classes:
H03H9/24; H03H3/007
Foreign References:
| JP2006518119A | 2006-08-03 | |||
| JP2006217207A | 2006-08-17 | |||
| JP2008504771A | 2008-02-14 | |||
| JP2007152501A | 2007-06-21 |
Attorney, Agent or Firm:
OKAWA AKIRA (JP)
Okawa 晃 (JP)
Okawa 晃 (JP)
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Claims: