Title:
DISPLACEMENT DETECTION SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/079967
Kind Code:
A1
Abstract:
A displacement detection sensor (1) is provided with a substrate (10) on which a first detection object and a second detection object are arranged, a first detection part (11) for detecting displacement in a first direction, and a second detection part (12) for detecting displacement in a second direction different from the first direction, the first detection part (11) and the second detection part (12) being arranged on the substrate (10), the first detection part (11) being arranged in at least the first detection object, and the second detection part (12) being arranged in at least the second detection object.
Inventors:
MORITA MASANORI (JP)
ANDO MASAMICHI (JP)
ANDO MASAMICHI (JP)
Application Number:
PCT/JP2019/034068
Publication Date:
April 23, 2020
Filing Date:
August 30, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01B7/16; G01D5/14
Foreign References:
| JP2015057822A | 2015-03-26 | |||
| JP2001518185A | 2001-10-09 | |||
| JP2004344180A | 2004-12-09 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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