Title:
DISPLACEMENT MEASUREMENT DEVICE USING OPTICAL INTERFEROMETER
Document Type and Number:
WIPO Patent Application WO/2011/004692
Kind Code:
A1
Abstract:
A displacement measurement device enabling prevention of fine interference fringes even if a movable section is inclined. The displacement measurement device (1) comprises a first base (2) and a second base (3) provided movably with respect to the first base (2). The first base (2) is provided with a light source (4), a beam splitter (5) for splitting the light beam emitted from the light source (4) into a measurement light beam and a reference light beam, a third reflecting plate (8) for reflecting the reference light beam from the beam splitter (5) toward a first reflecting plate (6), a photodetector (9) for detecting the interference light beam of the reference light beam reflected at the first reflecting plate (6) and the measurement light beam reflected at a second reflecting plate (7), and a λ/4 wavelength plate (10). The first reflecting plate (6) the reflecting surface of which is disposed parallel to the reflecting surface of the second reflecting plate (7) and the second reflecting plate (7) for reflecting the measurement light beam from the beam splitter (5) are provided to the second base (3).
Inventors:
IKEDA MASATO (JP)
OYAMA KATSUHIRO (JP)
OYAMA KATSUHIRO (JP)
Application Number:
PCT/JP2010/060433
Publication Date:
January 13, 2011
Filing Date:
June 21, 2010
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
IKEDA MASATO (JP)
OYAMA KATSUHIRO (JP)
IKEDA MASATO (JP)
OYAMA KATSUHIRO (JP)
International Classes:
G01B11/00; G01B9/02
Foreign References:
| JPH06123607A | 1994-05-06 | |||
| JPH10132507A | 1998-05-22 | |||
| JPS6358106A | 1988-03-12 | |||
| JP2005252246A | 2005-09-15 | |||
| JPS6020104A | 1985-02-01 |
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