Title:
DISPLACEMENT MEASURING APPARATUS, DISPLACEMENT MEASURING METHOD AND PHOTOLITHOGRAPHY DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/216325
Kind Code:
A1
Abstract:
Disclosed are a displacement measuring apparatus, a displacement measuring method and a photolithography device. The displacement measuring apparatus comprises a light source module (300), a diffraction element (200), a reading head assembly (100), light detection modules (410, 411, 412, 413) and a signal analysis module (500). The reading head assembly (100) is used to receive two input beams (610, 611) generated by the light source module (300) and guide the two input beams (610, 611) to contact the diffraction element (200) in parallel to generate diffraction, and then guide and combine the diffracted input beams to form at least one output beam (612, 613, 614), each output beam (612, 613, 614) comprising diffracted light signals emitted from the same light spot position of the diffraction element (200) in the same direction and respectively corresponding to the two input beams (610, 611). Displacement information of the diffraction element (200) can be obtained according to phase change information of an interference signal of each output beam (612, 613, 614). The displacement measuring apparatus and the displacement measuring method can achieve independent displacement measurement in different directions, and help to achieve wide-angle adaptive displacement measurement and reduce nonlinear errors. The photolithography device comprises the displacement measuring apparatus.
Inventors:
WU PING (CN)
Application Number:
PCT/CN2020/086684
Publication Date:
October 29, 2020
Filing Date:
April 24, 2020
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
G03F7/20; G01B11/02
Foreign References:
| CN107664482A | 2018-02-06 | |||
| CN106931887A | 2017-07-07 | |||
| US20180202842A1 | 2018-07-19 | |||
| US20180181006A1 | 2018-06-28 | |||
| CN107003155A | 2017-08-01 | |||
| CN106813578A | 2017-06-09 | |||
| CN1793778A | 2006-06-28 | |||
| CN104949616A | 2015-09-30 |
Attorney, Agent or Firm:
SHANGHAI SAVVY IP AGENCY CO., LTD. (CN)
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