Title:
DISPLAY DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/163503
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a display device having an organic EL element, the method comprising: a step for forming an organic EL element on a substrate 11 made of a flexible substrate; and a step for using an ALD process to form a protective film 16 made of an inorganic insulating material to cover the organic EL element. In the step for forming the protective film 16, the protective film 16 is formed by alternately performing a step for forming a high-density layer 16H using the ALD process, and a step for forming a low-density layer 16L using the ALD process, the low-density layer 16L being composed of the same constituent elements as those of the high-density layer 16H and having a density lower than that of the high-density layer 16H. The protective film 16 is composed of at least one high-density layer 16H and at least one low-density layer 16L, and has a laminated structure in which the low-density layer 16L and the high-density layer 16H are alternately laminated so as to be in contact with each other.
Inventors:
WASHIO KEISUKE (JP)
MATSUMOTO TATSUYA (JP)
EBISAWA TAKASHI (JP)
SHIDA JUNICHI (JP)
MATSUMOTO TATSUYA (JP)
EBISAWA TAKASHI (JP)
SHIDA JUNICHI (JP)
Application Number:
PCT/JP2017/039428
Publication Date:
September 13, 2018
Filing Date:
October 31, 2017
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
H05B33/04; C23C16/40; C23C16/455; C23C16/50; G09F9/30; H01L27/32; H01L51/50; H05B33/02; H05B33/10
Foreign References:
| JP2014127323A | 2014-07-07 | |||
| JP2007220646A | 2007-08-30 | |||
| JP2004063304A | 2004-02-26 | |||
| JP2001284042A | 2001-10-12 | |||
| JP2012521623A | 2012-09-13 | |||
| JP2012517101A | 2012-07-26 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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