Title:
DISPLAY DEVICE PRODUCTION METHOD AND PRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/167121
Kind Code:
A1
Abstract:
This display device production method comprises the step of forming a film of resin layer over a substrate, the step of placing into a first chamber the substrate having formed thereon the film of the resin layer and reducing the pressure inside the first chamber from atmospheric pressure to a first vacuum pressure, the step of transporting the substrate from the first chamber into a second chamber which has been adjusted to a second vacuum pressure, the step of measuring the gas that has been desorbed from the resin layer in the second chamber, and the step, after the gas has been measured, of forming a film of inorganic compound layer over the resin layer in the second chamber or in a third chamber. The step of forming the film of the inorganic compound layer involves a step of bringing the interior of the second or the third chamber to a third vacuum pressure prior to the forming of the film. The second vacuum pressure is a greater pressure than the third vacuum pressure.
Inventors:
NIINOH ATSUSHI
Application Number:
PCT/JP2018/007245
Publication Date:
September 06, 2019
Filing Date:
February 27, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H05B33/10; C23C14/54; C23C16/52; G09F9/00; H01L27/32; H01L51/50; H05B33/04
Foreign References:
| JP2014199789A | 2014-10-23 | |||
| JP2008069459A | 2008-03-27 | |||
| JP2004192858A | 2004-07-08 | |||
| JP2003236481A | 2003-08-26 | |||
| JP2004022400A | 2004-01-22 |
Attorney, Agent or Firm:
NOGAWA, Shintaro et al. (JP)
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