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Patent Searching and Data


Title:
DIVERGENCE-CONTROLLED HYBRID MULTIPLE ELECTRON BEAM -EMITTING DEVICE
Document Type and Number:
WIPO Patent Application WO2005074001
Kind Code:
A3
Abstract:
The invention concerns an electron-emitting device (50) with multiple electron beams (59) comprising a first structure (6) including a plurality of sources (61) of electron beams (69), hybridized with a second structure (7) comprising a plurality of lens apertures 8).

Inventors:
DESIERES YOHAN (FR)
NICOLAS PIERRE (FR)
GILLOT CHARLOTTE (FR)
GIDON SERGE (FR)
MARTIN JEAN-LUC (FR)
Application Number:
FR2004003407W
Publication Date:
July 20, 2006
Filing Date:
December 29, 2004
Export Citation:
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Assignee:
COMMISSARIAT A L'ENERGIE ATOMIQUE
DESIERES, YOHAN
NICOLAS, PIERRE
GILLOT, CHARLOTTE
GIDON, SERGE
MARTIN, JEAN-LUC
International Classes:
H01J9/02; H01J3/02; H01J9/18; H01J29/51; H01J37/073; H01J37/24; H01J37/317
Foreign References:
EP1249855A12002-10-16
US5548185A1996-08-20
EP0780879A21997-06-25
GB1380126A1975-01-08
Other References:
BAYLOR L R ET AL: "Digital electrostatic electron-beam array lithography" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY. B, MICROELECTRONICS AND NANOMETER STRUCTURES PROCESSING, MEASUREMENT AND PHENOMENA, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, NY, US, vol. 20, no. 6, novembre 2002 (2002-11), pages 2646-2650, XP012009601 ISSN: 1071-1023
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