Title:
DLC-COATED TOOL
Document Type and Number:
WIPO Patent Application WO/2008/149824
Kind Code:
A1
Abstract:
A DLC-coated tool produced by forming a substantially hydrogen-free DLC film
on a substrate, wherein the DLC film has a density of 3.0 to 3.4g/cm3
and a nanoindentation hardness of 40 to 100GPa and wherein in the surface scanning
test with a stylus type surface profile measuring apparatus provided with a stylus
whose point has a radius of curvature of 2μm at a measurement feed of 0.01mm,
the ratio of the absolute value of a difference between the arithmetic mean surface
roughness of the substrate before film formation and the arithmetic mean roughness
of the DLC film to the thickness of the DLC film, ΔRa/t, is 0.05 or below and
the ratio of the occupancy area ratio (s) of convexed and recessed parts of the
DLC film due to the adhesion or desorption of foreign matter to the thickness (t)
of the film, s/t, is 0.01 (%/nm) or below.
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Inventors:
TAKIKAWA HIROFUMI (JP)
HASEGAWA YUSHI (JP)
TAKI MAKOTO (JP)
HASEGAWA YUSHI (JP)
TAKI MAKOTO (JP)
Application Number:
PCT/JP2008/060089
Publication Date:
December 11, 2008
Filing Date:
May 26, 2008
Export Citation:
Assignee:
ONWARD CERAMIC COATING CO LTD (JP)
NAT UNIV CORP TOYOHASHI UNIV T (JP)
TAKIKAWA HIROFUMI (JP)
HASEGAWA YUSHI (JP)
TAKI MAKOTO (JP)
NAT UNIV CORP TOYOHASHI UNIV T (JP)
TAKIKAWA HIROFUMI (JP)
HASEGAWA YUSHI (JP)
TAKI MAKOTO (JP)
International Classes:
B23B27/14; B23B27/20; B23B51/00; B23C5/16; C23C14/06; C30B29/04
Foreign References:
JP2003062708A | 2003-03-05 | |||
JP2001192864A | 2001-07-17 | |||
JPH07188916A | 1995-07-25 | |||
JP2007083382A | 2007-04-05 | |||
JP2003251503A | 2003-09-09 | |||
JPH10324971A | 1998-12-08 |
Attorney, Agent or Firm:
MATOBA, Motonori (MR Building 3F30-17, Hongo 1-chom, Bunkyo-ku Tokyo, JP)
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