Title:
DOOR OPENING APPARATUS, TRANSMISSION CHAMBER AND SEMICONDUCTOR PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/214578
Kind Code:
A1
Abstract:
Provided in the present disclosure are a door opening apparatus, a transmission chamber and a semiconductor processing device; the door opening device is used for opening or closing a sealing door of a wafer cassette and comprises a housing component, which is used for movably docking to a chamber wall of a transmission chamber and which is located at a peripheral position of a transfer interface at which the chamber wall docks to a wafer transfer opening of a wafer cassette so as to open or close the transfer interface and wafer transfer opening of the wafer cassette, a first opening being provided at a side of the housing component that faces the wafer cassette; a docking assembly is disposed at the first opening, being used for docking a sealing door and separating the sealing door from the wafer cassette when the housing component is at a position in which the transfer interface and wafer transfer opening are closed, and the sealing door or the docking assembly sealingly cooperating with the first opening so as to form a sealed space within the housing component. The door opening apparatus provided by the present disclosure may ensure that contaminants produced by the descibed movable parts and lubricating oil thereon do not cause any contamination to a wafer at the interior of the wafer cassette, thereby being beneficial in improving product yield and performance.
Inventors:
DONG JINWEI (CN)
ZHAO JINRONG (CN)
ZHAO JINRONG (CN)
Application Number:
PCT/CN2019/085678
Publication Date:
November 14, 2019
Filing Date:
May 06, 2019
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/677
Foreign References:
| US20020069933A1 | 2002-06-13 | |||
| US20020069933A1 | 2002-06-13 | |||
| KR20070103134A | 2007-10-23 | |||
| CN106033737A | 2016-10-19 | |||
| CN103280419A | 2013-09-04 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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