DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENING/CLOSING SYSTEM

Title:

DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENING/CLOSING SYSTEM

Document Type and Number:

WIPO Patent Application WO/2017/022431

Kind Code:

A1

Abstract:

Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base 41 which constitutes a part of a wall isolating a transport space from an external space; an opening portion 92 provided in the base 41; a door 81 which is capable of opening and closing the opening portion 92; a first seal member 94 which seals a gap between the base 41 and a container 7; a second seal member 96 which seals a gap between the base 41 and the door 81; a sealed space which is constituted by the base 41, the first seal member 94, the second seal member 96, a lid member 72, and the door 81 when the container 7 is in a state of contact with the opening portion 92 with the first seal member 94 therebetween; a first gas injection unit 87 which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.

Inventors:

KAWAI TOSHIHIRO (JP)
TANIYAMA YASUSHI (JP)
KOMIYA MUNEKAZU (JP)
SHIGETA TAKASHI (JP)

Application Number:

PCT/JP2016/070567

Publication Date:

February 09, 2017

Filing Date:

July 12, 2016

Export Citation:

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Assignee:

SINFONIA TECHNOLOGY CO LTD (JP)

International Classes:

H01L21/677

Foreign References:

US20080298933A1	2008-12-04
JP2006074033A	2006-03-16

Other References: