Title:
DOPING METHOD AND LAYERED BODY FOR DOPING
Document Type and Number:
WIPO Patent Application WO/2016/031826
Kind Code:
A1
Abstract:
Provided is a doping method with which it is possible to omit a step for coating a coating-type diffusion agent onto a base material, and a layered body for doping for use with the doping method. This doping method includes: layering, onto a semiconductor layer or a base material, a layered body for doping (100) having a transparent base material (10) and a light-absorbent dopant film (20) layered on the transparent base material, the layering being carried out such that the light-absorbent dopant film (10) faces the semiconductor layer or a base material (30); and doping the semiconductor layer or the base material (30) with a dopant by irradiating light (50) onto the light-absorbent dopant film (20) through the transparent base material (10), the dopant being derived from the light-absorbent dopant film (20). This layered body for doping (100) has the transparent base material (10) and the light-absorbent dopant film (20) layered on the transparent base material.
Inventors:
IMAMURA TETSUYA (JP)
TOMIZAWA YUKA (JP)
IKEDA YOSHINORI (JP)
TOMIZAWA YUKA (JP)
IKEDA YOSHINORI (JP)
Application Number:
PCT/JP2015/073893
Publication Date:
March 03, 2016
Filing Date:
August 25, 2015
Export Citation:
Assignee:
TEIJIN LTD (JP)
International Classes:
H01L21/225; H01L21/22; H01L31/068; H01L31/18
Foreign References:
| JPH1050624A | 1998-02-20 | |||
| JP2010003834A | 2010-01-07 | |||
| JP2013041938A | 2013-02-28 | |||
| JP2007115927A | 2007-05-10 | |||
| JPH01313930A | 1989-12-19 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
Aoki 篤 (JP)
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