DOUBLE-BEAM INTERFERENCE CALIBRATION DEVICE FOR LASER VIBROMETER AND CALIBRATION METHOD THEREFOR

Title:

DOUBLE-BEAM INTERFERENCE CALIBRATION DEVICE FOR LASER VIBROMETER AND CALIBRATION METHOD THEREFOR

Document Type and Number:

WIPO Patent Application WO/2018/130219

Kind Code:

A1

Abstract:

A double-beam interference calibration device for a laser vibrometer, the calibration device consisting of a standard laser source (1), two optoisolators (2, 15), two polarization beam splitters (3, 12), a lens (4), a lambda/4 wave plate (5), a piezoelectric cantilever beam (6), five deflecting prisms (7, 8, 9, 10, 14), two lambda/2 wave plates (11, 13), a drive power source (17), a signal generator (18) and a data acquisition system (19). Optical frequency modulation is implemented on the basis of a piezoelectric effect. The structural deformation of the piezoelectric cantilever beam (6) under a given electric field is used to set up the equivalent working environment of the laser vibrometer so as to calibrate the whole laser vibrometer, requirements for measurement and calibration source tracing are met, and the influence of the measurement light paths of the calibrated laser vibrometer on the measurement results is eliminated by using the optoisolators. Fast response and calibration are achieved by using the piezoelectric effect, thereby achieving micrometric displacement calibration; the calibration frequency range is wider, and the calibration range is enlarged. Also disclosed is a double-beam interference calibration device for a laser vibrometer.

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Inventors:

FAN SHANGCHUN (CN)
LI ZHONGXIANG (CN)

Application Number:

PCT/CN2018/072626

Publication Date:

July 19, 2018

Filing Date:

January 15, 2018

Export Citation:

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Assignee:

UNIV BEIHANG (CN)

International Classes:

G01H9/00

Foreign References:

CN106840359A	2017-06-13
CN104061998A	2014-09-24
CN101021563A	2007-08-22
CN105758510A	2016-07-13
CN104897047A	2015-09-09
CN101968380A	2011-02-09
US20040052687A1	2004-03-18

Attorney, Agent or Firm:

CO-TALENT INTELLECTUAL PROPERTY FIRM (CN)

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