Title:
DOUBLE-FREQUENCY POWER-DRIVEN INDUCTIVELY COUPLED PLASMA TORCH, AND APPARATUS FOR GENERATING NANOPARTICLE USING SAME
Document Type and Number:
WIPO Patent Application WO/2016/209007
Kind Code:
A1
Abstract:
A double-frequency power-driven inductively coupled plasma torch, according to one embodiment of the present invention, comprises: a hollow confinement pipe for providing a space where thermal plasma is formed therein; an induction coil for covering the confinement pipe; and a power supply source for supplying power to the induction coil, wherein the power supply source supplies power having at least two different frequencies to the induction coil.
Inventors:
PARK HEE-CHANG (KR)
YUN DONG-WON (KR)
SEO JUN-HO (KR)
NAM JUNSEOK (KR)
LEE MI-YEON (KR)
KIM JEONG-SOO (KR)
YUN DONG-WON (KR)
SEO JUN-HO (KR)
NAM JUNSEOK (KR)
LEE MI-YEON (KR)
KIM JEONG-SOO (KR)
Application Number:
PCT/KR2016/006719
Publication Date:
December 29, 2016
Filing Date:
June 23, 2016
Export Citation:
Assignee:
KOREA MACH & MATERIALS INST (KR)
IND COOP FOUND OF CHONBUK NAT UNIV (KR)
IND COOP FOUND OF CHONBUK NAT UNIV (KR)
International Classes:
H05H1/26; B22F9/14; H05H1/46; B22F1/054
Foreign References:
KR20110129299A | 2011-12-01 | |||
KR20120001046A | 2012-01-04 | |||
KR20110087598A | 2011-08-03 | |||
JPH11251088A | 1999-09-17 | |||
KR20100059596A | 2010-06-04 | |||
KR20100025699A | 2010-03-10 |
Attorney, Agent or Firm:
PANKOREA PATENT AND LAW FIRM (KR)
팬코리아특허법인 (KR)
팬코리아특허법인 (KR)
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